MicroDoer™ PFA series pleated filter cartridges are constructed of 100% fluoropolymer membrane and hardware for ultimate performance in the most demanding microelectronics applications. They deliver extraordinary chemical compa...
MicroDoer™ PFA series pleated filter cartridges are constructed of 100% fluoropolymer membrane and hardware for ultimate performance in the most demanding microelectronics applications. They deliver extraordinary chemical compatibility, heat tolerance, and filter cleanliness. Available in industry leading effective filtration areas of 0.9sqm (9.7sqft) and 1.12sqm (12.1sqft). Product purity is assured with proven ultra-low extractable TOC and ionic substances. Cartridges are 100% integrity tested to assure optimized retention performance.
Features
100% fluoropolymer, with PTFE membrane and PFA hardware
Ultimate chemical compatibility and heat tolerance
Proprietary acid treatment and extended duration 18 mega-ohm rinse assures lowest degree of extractable substances
Applications
Aggressive wet-etch solutions
Concentrated acids and caustics
Oxidizers ozonated solutions
Fine chemical filtration
Ultra-pure process water production
Plating solutions
Product Quality
Each membrane filter element is individually tested for integrity by diffusion flow.
Individual elements are tracked by serial number.
Produced in a clean-room environment for product purity & cleanliness.
Manufactured within an ISO 9001:2015 certified quality management system.
Certificate of Quality document is provided with each production lot.
Materials of Construction
Media:
PTFE
Support Layers:
PTFE
Cage/Core/End Caps:
PFA (polyfluoroalkyl)
Adapter Reinforcement:
Polysulfone or Stainless Steel
Seal Options:
E-FKM
Dimensions
Diameter:
69mm (2.72")
Lengths:
10”, 20”, 30”, 40”
Filtration Area:
0.9 m² (9.7ft²) per 10” element (Standard) 1.12 m² (12.1ft²) per 10” element ("H" option)
Operating Conditions
Operating Temperature:
185°C (365°F) max.
Operating dP (max.):
4 bar (58 psi) @ 20°C (68°F),2 bar (29 psi) @ 80°C (176°F)
Change-Out dP:
2.6 bar (38 psi) @ 20°C (68°F)
Clean Pressure Drop
Effluent Quality
Particulate Release:
≤ 2 /ml at ≥0.2μ ≤ 1 /ml at ≥0.5μ
TOC:
non-detectable
ionic metals:
<15 ppb
*Data for "SCH" high-performance semi-conductor rinse option
